環保專案成果報告查詢系統

專案計畫編號
經費年度	112
計畫經費	15,620 千元
預算科目	科技發展-淨零排放科技
專案開始日期	2023/02/22
專案結束日期	2023/11/30
專案主持人	黃靜萍
主辦單位	循環署循環處理組
承辦人	李佳芸
執行單位	工業技術研究院
專案分類	科技計畫、資源循環
中文關鍵字	氫氟酸、氟化鈣、螢石
英文關鍵字	Hydrofluoric Acid, Calcium Fluoride, Fluorite
協同主持人	蘇秋琿
共同主持人
計畫聯絡人	陳麗娟
計畫聯絡電話	03-5915164#
計畫聯絡信箱	anae_chen@itri.org.tw

中文摘要	我國半導體產能占全球60%市占率，製程所使用的濕式化學品需求量大、純度極高，其中氫氟酸為濕式化學品的關鍵原物料，估計年使用量約6萬噸，目前國內含氟廢棄物廠商系以廢氫氟酸（C-0202，約7萬噸）、氟化鈣污泥（D-0902和R-0910，約13萬噸）進行申報，且降階使用或異業再利用等方式進行去化處理，屬於線性消費經濟。然而，我國缺乏氟資源純化技術，因此如何將廢氫氟酸資源做有效益的回收、純化與再利用技術導入，以實現2050年淨零轉型中第八項「資源循環零廢棄」之關鍵戰略，以延長化學品使用週期。有鑑於此，本團隊研析我國半導體產業廢氫氟酸資源流向分布，整合料源分析資訊且建立我國高純度酸級氟化鈣試量產製程技術，達到廢氫氟酸資源循環再利用，同時建構製程之減碳效益評析，作為推動國內廢氫氟酸封閉循環路徑之布局。今年度工作項目共計四大項，自2月22日至11月30日為止，如期完成工作目標項目，並符合查核點規劃。今年度所完成的工項包含：1.完成盤查我國5家次科技廠訪視、盤查及製程產出的廢氫氟酸處理方式、產出量等物質流布圖基線資訊之蒐集與評析，並完成廢氫氟酸36件次、氟化鈣污泥38件次的組成基線分析，包含純度、不純物質含量等物化性分析與物質表，作為純化技術可行性評估，同時研析國際半導體廢氫氟酸資源應用技術，作為我國廢氫氟酸資源循環技術發展策略參考。2.完成酸級氟化鈣試量產線設備能量建置，包含反應槽體、淨化設備、造粒設備等，以26件70%以上氟化鈣污泥轉至97%酸級氟化鈣純化作為製程參數測試與規格驗證且建立入料和產品規格組成表。3.在碳足跡盤查部分，研析國內廢氫氟酸資源再利用及天然螢石製程生命週期與碳足跡熱點分析，作為酸級氟化鈣製程碳足跡評估基礎，完成製程碳排熱點研析且提出可優化碳足跡策略方法。4.整合工作進度與成果推廣，完成3篇研討會論文投稿與發表，包含氟化鈣檢測分析技術及含氟廢水處理技術；舉辦「化學品資源高值化循環利用技術計畫」專家委員諮詢會議1場次及「國內廢氫氟酸資源循環流向研析及純化循環再利用的機會」說明會議1場次，及3場次的「廢氫氟酸資源高值化」研商會議，作為研擬我國廢氫氟酸資源再利用發展方向與帶動國內氟資源廢棄物循環再生新產業生態鏈，強化國內關鍵資源再利用與高值化，減少廢棄物走向降階利用或掩埋處理一途。
中文關鍵字	氫氟酸、氟化鈣、螢石

中文摘要

我國半導體產能占全球60%市占率，製程所使用的濕式化學品需求量大、純度極高，其中氫氟酸為濕式化學品的關鍵原物料，估計年使用量約6萬噸，目前國內含氟廢棄物廠商系以廢氫氟酸（C-0202，約7萬噸）、氟化鈣污泥（D-0902和R-0910，約13萬噸）進行申報，且降階使用或異業再利用等方式進行去化處理，屬於線性消費經濟。然而，我國缺乏氟資源純化技術，因此如何將廢氫氟酸資源做有效益的回收、純化與再利用技術導入，以實現2050年淨零轉型中第八項「資源循環零廢棄」之關鍵戰略，以延長化學品使用週期。有鑑於此，本團隊研析我國半導體產業廢氫氟酸資源流向分布，整合料源分析資訊且建立我國高純度酸級氟化鈣試量產製程技術，達到廢氫氟酸資源循環再利用，同時建構製程之減碳效益評析，作為推動國內廢氫氟酸封閉循環路徑之布局。今年度工作項目共計四大項，自2月22日至11月30日為止，如期完成工作目標項目，並符合查核點規劃。今年度所完成的工項包含：1.完成盤查我國5家次科技廠訪視、盤查及製程產出的廢氫氟酸處理方式、產出量等物質流布圖基線資訊之蒐集與評析，並完成廢氫氟酸36件次、氟化鈣污泥38件次的組成基線分析，包含純度、不純物質含量等物化性分析與物質表，作為純化技術可行性評估，同時研析國際半導體廢氫氟酸資源應用技術，作為我國廢氫氟酸資源循環技術發展策略參考。2.完成酸級氟化鈣試量產線設備能量建置，包含反應槽體、淨化設備、造粒設備等，以26件70%以上氟化鈣污泥轉至97%酸級氟化鈣純化作為製程參數測試與規格驗證且建立入料和產品規格組成表。3.在碳足跡盤查部分，研析國內廢氫氟酸資源再利用及天然螢石製程生命週期與碳足跡熱點分析，作為酸級氟化鈣製程碳足跡評估基礎，完成製程碳排熱點研析且提出可優化碳足跡策略方法。4.整合工作進度與成果推廣，完成3篇研討會論文投稿與發表，包含氟化鈣檢測分析技術及含氟廢水處理技術；舉辦「化學品資源高值化循環利用技術計畫」專家委員諮詢會議1場次及「國內廢氫氟酸資源循環流向研析及純化循環再利用的機會」說明會議1場次，及3場次的「廢氫氟酸資源高值化」研商會議，作為研擬我國廢氫氟酸資源再利用發展方向與帶動國內氟資源廢棄物循環再生新產業生態鏈，強化國內關鍵資源再利用與高值化，減少廢棄物走向降階利用或掩埋處理一途。

中文關鍵字

氫氟酸、氟化鈣、螢石

類型	檔名	檔案大小	說明	最新版公開日期
期末報告	１１２ＡＢ００６化學品資源高值化循環利用技術計畫成果報告(公開版).pdf	17MB		2024/2/29 上午 12:00:00

摘要	The semiconductor industry in our country holds a global market share of 60% in production capacity. The manufacturing process relies heavily on large quantities of high-purity wet chemicals, with hydrofluoric acid being a crucial raw material. The estimated annual usage of hydrofluoric acid is around 60,000 tons. Currently, domestic waste management companies handle waste hydrofluoric acid (C-0202, approximately 70,000 tons) and calcium fluoride sludge (D-0902 and R-0910, approximately 130,000 tons) through declaration processes. These materials are downgraded or reused across different industries, reflecting a linear consumption model. However, our country lacks fluoride resource purification technology. Therefore, implementing effective recycling, purification, and reuse techniques for waste hydrofluoric acid resources becomes crucial. This aligns with the eighth strategy of the 2050 net-zero transition - "Zero Waste Resource Circulation" - aiming to extend the lifespan of chemical usage. To address this, our team has analyzed the distribution of waste hydrofluoric acid resources within the semiconductor industry. We've integrated data from material source analyses and developed a pilot process for producing high-purity acid-grade calcium fluoride. This process facilitates the circular reuse of waste hydrofluoric acid resources while evaluating the carbon reduction benefits of the manufacturing process. This initiative lays the foundation for establishing a closed-loop pathway for domestic waste hydrofluoric acid. The annual work plan for this year comprises four major components, spanning from February 22nd to November 30th. The work objectives were successfully met within the planned timeframe and aligned with audit point criteria. The end-of-year work progress report includes the following: Completion of a survey of five secondary technology factories in our country, involving visits, assessments, and the collection and analysis of baseline information on the treatment methods and output of waste hydrofluoric acid, including material flow diagrams. This also includes the composition baseline analysis of 36 instances of waste hydrofluoric acid and 38 instances of calcium fluoride sludge, encompassing purity, impurity content, physical and chemical analyses, and material composition tables. This analysis serves as a feasibility assessment for purification technologies. Additionally, international semiconductor waste hydrofluoric acid resource utilization technologies were analyzed, providing strategic references for the development of our country's waste hydrofluoric acid resource recycling technology. Completion of the energy setup of the pilot production line for acid-grade calcium fluoride, which includes reaction vessels, purification equipment, granulation equipment, and more. This setup is used for testing process parameters and specification verification, with 70% or more of 26 instances of calcium fluoride sludge transformed into 97% acid-grade calcium fluoride purification. The composition tables for input and product specifications were established. In the carbon footprint assessment section, an analysis was conducted on the reuse of domestic waste hydrofluoric acid resources and the life cycle and carbon footprint hotspots of natural fluorite process. This serves as the foundation for carbon footprint evaluation of the acid-grade calcium fluoride production process. The analysis of process carbon emissions hotspots was completed, and optimized carbon footprint strategies were proposed. Integration of work progress and promotion of results, including the submission and presentation of two seminar papers on calcium fluoride testing and analysis techniques and fluorine-containing wastewater treatment technologies. One expert advisory meeting for the "High-Value Recycling Technology for Chemical Resources" program and one information session on "Domestic Waste Hydrofluoric Acid Resource Flow Analysis and Purification Recycling Opportunities" were organized. Additionally, three discussions were held on "High-Value Utilization of Waste Hydrofluoric Acid Resources," which are part of the development of the direction for the reuse of waste hydrofluoric acid resources in our country and the promotion of a domestic fluorine resource waste recycling new industrial ecosystem, aiming to strengthen domestic key resource reuse and value-added processes while reducing the disposal of waste materials through downgrading or burial.
英文關鍵字	Hydrofluoric Acid, Calcium Fluoride, Fluorite

摘要

The semiconductor industry in our country holds a global market share of 60% in production capacity. The manufacturing process relies heavily on large quantities of high-purity wet chemicals, with hydrofluoric acid being a crucial raw material. The estimated annual usage of hydrofluoric acid is around 60,000 tons. Currently, domestic waste management companies handle waste hydrofluoric acid (C-0202, approximately 70,000 tons) and calcium fluoride sludge (D-0902 and R-0910, approximately 130,000 tons) through declaration processes. These materials are downgraded or reused across different industries, reflecting a linear consumption model. However, our country lacks fluoride resource purification technology. Therefore, implementing effective recycling, purification, and reuse techniques for waste hydrofluoric acid resources becomes crucial. This aligns with the eighth strategy of the 2050 net-zero transition - "Zero Waste Resource Circulation" - aiming to extend the lifespan of chemical usage. To address this, our team has analyzed the distribution of waste hydrofluoric acid resources within the semiconductor industry. We've integrated data from material source analyses and developed a pilot process for producing high-purity acid-grade calcium fluoride. This process facilitates the circular reuse of waste hydrofluoric acid resources while evaluating the carbon reduction benefits of the manufacturing process. This initiative lays the foundation for establishing a closed-loop pathway for domestic waste hydrofluoric acid. The annual work plan for this year comprises four major components, spanning from February 22nd to November 30th. The work objectives were successfully met within the planned timeframe and aligned with audit point criteria. The end-of-year work progress report includes the following: Completion of a survey of five secondary technology factories in our country, involving visits, assessments, and the collection and analysis of baseline information on the treatment methods and output of waste hydrofluoric acid, including material flow diagrams. This also includes the composition baseline analysis of 36 instances of waste hydrofluoric acid and 38 instances of calcium fluoride sludge, encompassing purity, impurity content, physical and chemical analyses, and material composition tables. This analysis serves as a feasibility assessment for purification technologies. Additionally, international semiconductor waste hydrofluoric acid resource utilization technologies were analyzed, providing strategic references for the development of our country's waste hydrofluoric acid resource recycling technology. Completion of the energy setup of the pilot production line for acid-grade calcium fluoride, which includes reaction vessels, purification equipment, granulation equipment, and more. This setup is used for testing process parameters and specification verification, with 70% or more of 26 instances of calcium fluoride sludge transformed into 97% acid-grade calcium fluoride purification. The composition tables for input and product specifications were established. In the carbon footprint assessment section, an analysis was conducted on the reuse of domestic waste hydrofluoric acid resources and the life cycle and carbon footprint hotspots of natural fluorite process. This serves as the foundation for carbon footprint evaluation of the acid-grade calcium fluoride production process. The analysis of process carbon emissions hotspots was completed, and optimized carbon footprint strategies were proposed. Integration of work progress and promotion of results, including the submission and presentation of two seminar papers on calcium fluoride testing and analysis techniques and fluorine-containing wastewater treatment technologies. One expert advisory meeting for the "High-Value Recycling Technology for Chemical Resources" program and one information session on "Domestic Waste Hydrofluoric Acid Resource Flow Analysis and Purification Recycling Opportunities" were organized. Additionally, three discussions were held on "High-Value Utilization of Waste Hydrofluoric Acid Resources," which are part of the development of the direction for the reuse of waste hydrofluoric acid resources in our country and the promotion of a domestic fluorine resource waste recycling new industrial ecosystem, aiming to strengthen domestic key resource reuse and value-added processes while reducing the disposal of waste materials through downgrading or burial.

英文關鍵字

Hydrofluoric Acid, Calcium Fluoride, Fluorite