EPA-96-G104-02-222

096

2,950 千元

2007/03/07

2007/12/31

林哲昌

水保處

儲雯娣

財團法人中興工程顧問社

水質保護

半導體業, 光電業, 氨氮

Semiconductor industry, photovoltaic industry, ammonia-nitrogen

wtchu@sun.epa.gov.tw

台灣為世界高科技產業製造重鎮，製程中所使用的化學物質種類繁 多， 可能在廢水排放時造成相當程度之污染。本計畫主要目的為調查 光電及半導體業廢水之污染特性， 並成立專案小組， 評估訂定高科技 產業放流水中特殊物質管制項目及排放標準之可行性。 2006 年薄膜電晶體液晶顯示器(TFT-LCD)製造和半導體製造兩產 業之產值分別佔光電業和半導體業總產值之66%和53%， 廢水量則分 別佔光電業和半導體業總廢水量之85%和66%， 經專案小組前置會議 所作成結論， 計畫之水質調查集中於TFT-LCD 製造業、半導體製造業 和三科學園區污水處理廠。 調查結果顯示目標廠家納管廢水與放流水氨氮與正磷酸鹽濃度偏 高，綜合考量高科技廠使用大宗化學品及其危害性、排入廢水可能性、 處理效能、對承受水體影響和國外管制標準等因素， 提出放流水標準 中優先增列氨氮管制項目， 並依新舊廠分別訂定管制值， 對於新設廠 管制參考值為25 mg/L； 對於既有廠管制參考值則為35 mg/L， 且提供 3~5 年之緩衝期，給予既有廠家充裕時間於廠內先行執行化學品減排， 同步改善處理效能，並且持續將放流水氨氮濃度監測值回報予環保署。 依據預防管理原則，建議環保署與科學工業園區管理局及廠商簽訂 議定書， 由廠商進行廠內污染自我削減管理， 環保署得視廠家之化學 品減排成效、廠內廢水處理效能與放流水水質， 再行評估相關廢水管 制標準之訂定。 建議科學園區內、區外半導體業及光電製造業廠家，針對廠內大宗 製程化學品， 如IPA、PGMEA、DMSO 與TMAH 等化合物進行定期水 質檢測， 藉以了解廢水處理效能， 並建立背景水質數據； 建議將 TFT-LCD 製造業納入「放流水標準」管制事業別之「晶圓製造及半導 體製造業」， 修訂事業別名稱為「晶圓製造、半導體製造及薄膜電晶體 液晶顯示製造業」。

半導體業, 光電業, 氨氮

Microsoft Word - EPA-96-G104-02-222.pdf

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[期末報告]公開完整版

2008/3/1 上午 12:00:00

Taiwan is one of the major clusters of high-technology manufacture in the world, including photovoltaic and semiconductor industries. There are various chemicals used in the industries and may cause significant pollution when discharging wastewater. The main purpose of this study is to investigate the pollution characteristics of discharged wastewater from photovoltaic and semiconductor industries. An expert panel has been set up to review the current effluent standard and regulatory measure of the characteristic pollutant in the industries. In 2006, the output values of TFT-LCD (thin-film transistor liquid-crystal displayer) and semiconductor manufacture are 66% and 53% of the total of photovoltaic and semiconductor industries, respectivel y. On the other hands, the corresponding wastewater discharge flow rates are 85% and 66% of the total of photovoltaic and semiconductor industries, respectivel y. According to the conclusion of expert panel, the study should focus on investigating the wastewater characteristic of TFT-LCD manufacture, semiconductor manufacture, and wastewater treatment plant of Science Park. The investigation revealed that ammonia-nitrogen and orthophosphate concentration in the effluent of the focusing industries are higher than most industries in Taiwan. We have recommended that effluent standard should regulate ammonia-nitrogen in priorit y, while considering the factors like consuming amount of chemicals in the focusing industries, the toxicit y, the possibility that the chemicals enter the wastewater, the wastewater treatment efficiency, the environment impact and the foreign effluent standards. Recommended regulating values of ammonia-nitrogen concentration for newly founded and already established factories are 25 and 35 mg/L, respectivel y. It is also suggested that a buffering period should be given for the already established factories to cut down of nitrogen-contained chemicals consumption, monitor the variation of ammonia-nitrogen discharge, and report to the EPA. According to the principle of “control and prevention”, it is suggested that EPA can have a contract with Science Park Administration and the relevant manufactures. The manufactures shall cut down the chemicals consumption in the processing as well as the amount discharged into wastewater. EPA will then regulate the related items of effluent standard based on the results of the reduction chemicals consumption, wastewater treatment efficiency and the effluent qualit y. It is suggested that TFT-LCD and semiconductor manufacturers (either located at inside or outside of Science Parks) shall monitor the consumed amount of major chemicals used in the processing and their discharge into the effluent. The focusing species include IPA, PGMEA, DMSO and TMAH. This will help reveal the wastewater treatment efficiency and provide sufficient background data for wastewater qualit y. Besides, due to the similar processing and wastewater production, it is also suggested that TFT-LCD manufacture should be classified into the category “wafer manufacturing, and semiconductor manufacturing industries” of the current effluent standard. This category, however, should be renamed as “wafer manufacturing, semiconductor manufacturing and TFT-LCD manufacturing industries”.

Semiconductor industry, photovoltaic industry, ammonia-nitrogen