環保專案成果報告查詢系統

專案計畫編號	EPA-97-U1U4-04-003
經費年度	097
計畫經費	3,850 千元
專案開始日期	2008/06/05
專案結束日期	2009/03/31
專案主持人	吳俊哲
主辦單位	永續發展室(停用)
承辦人	林燕柔
執行單位	凱特利斯科技股份有限公司
專案分類	大氣空氣
中文關鍵字	空降污染物,臭氧/觸媒氧化系統,無塵室
英文關鍵字	Airborne Molecular Contamination (AMC), Heterogeneous Ozonation, Clean Room
協同主持人	張立德,林樹榮
共同主持人
計畫聯絡人	李泔涓
計畫聯絡電話	03-4700347
計畫聯絡信箱	leeganjiuan@hotmail.com

中文摘要	由於無塵室之空降污染物對人體健康造成之影響已受到相當程度的重視，本計畫主要針對高科技產業無塵室室內空氣污染源之無機酸（氫氟酸、鹽酸、硫酸、硝酸）、無機鹼（氫氧化四甲基銨）與有機物（異丙醇、丙酮、丙二醇甲醚醋酸酯、二甲基亞硫）進行粒狀觸媒去除效率與臭氧/觸媒氧化之研究，並發展乙套可供室內循環淨化處理之實體設備。本計畫之執行主要分為兩個主要單元，第一階段乃提出實驗室的研究成果，第二則針對實際設備系統進行組裝及實測的工作。第一階段為實驗室空降污染物基本分析及單一觸媒程序與臭氧/觸媒程序之操作條件測試，以獲得最佳化處理之參數，並據以建立實際設備可應用之技術相關資料。實驗結果顯示：無機酸之去除效率，以添加粒狀觸媒A 150 g，Q=1,223 mL/min較佳；無機鹼之去除率，以添加粒狀觸媒B 100 g，Q=937 mL/min較佳；有機物之去除則以臭氧劑量8.12±0.02 ppm/觸媒添加量60 g，流量為Q=730 mL/min之組合較佳。第二階段為建置實廠處理系統，該設備裝置於本校工學院之無塵室進行實際污染源的長時間測試，以確實評估並檢討欲開發設備單元的實際效能與參數校驗。設備處理空降污染物以換氣率5.5 ach，風量0.18 m3/s，粒狀觸媒A 1 kg，粒狀觸媒B 1 kg，粉狀觸媒450 g，對其之直接去除率皆可達90%以上。整體而言，觸媒氧化技術淨化無塵室空氣處理設備於3小時內可有效降低無塵室之空降污染物，因此，長時間使用此處理設備可改善無塵室室內之空氣品質，進而改善對操作人員之健康危害，並有助於提升產品之良率。觸媒氧化技術淨化無塵室空氣處理設備經由實驗室及實廠之試驗，可計算求得每年操作成本（NT/year）包括電力及耗材成本的估算約為$31,633元。
中文關鍵字	空降污染物,臭氧/觸媒氧化系統,無塵室

中文摘要

由於無塵室之空降污染物對人體健康造成之影響已受到相當程度的重視，本計畫主要針對高科技產業無塵室室內空氣污染源之無機酸（氫氟酸、鹽酸、硫酸、硝酸）、無機鹼（氫氧化四甲基銨）與有機物（異丙醇、丙酮、丙二醇甲醚醋酸酯、二甲基亞硫）進行粒狀觸媒去除效率與臭氧/觸媒氧化之研究，並發展乙套可供室內循環淨化處理之實體設備。本計畫之執行主要分為兩個主要單元，第一階段乃提出實驗室的研究成果，第二則針對實際設備系統進行組裝及實測的工作。第一階段為實驗室空降污染物基本分析及單一觸媒程序與臭氧/觸媒程序之操作條件測試，以獲得最佳化處理之參數，並據以建立實際設備可應用之技術相關資料。實驗結果顯示：無機酸之去除效率，以添加粒狀觸媒A 150 g，Q=1,223 mL/min較佳；無機鹼之去除率，以添加粒狀觸媒B 100 g，Q=937 mL/min較佳；有機物之去除則以臭氧劑量8.12±0.02 ppm/觸媒添加量60 g，流量為Q=730 mL/min之組合較佳。第二階段為建置實廠處理系統，該設備裝置於本校工學院之無塵室進行實際污染源的長時間測試，以確實評估並檢討欲開發設備單元的實際效能與參數校驗。設備處理空降污染物以換氣率5.5 ach，風量0.18 m3/s，粒狀觸媒A 1 kg，粒狀觸媒B 1 kg，粉狀觸媒450 g，對其之直接去除率皆可達90%以上。整體而言，觸媒氧化技術淨化無塵室空氣處理設備於3小時內可有效降低無塵室之空降污染物，因此，長時間使用此處理設備可改善無塵室室內之空氣品質，進而改善對操作人員之健康危害，並有助於提升產品之良率。觸媒氧化技術淨化無塵室空氣處理設備經由實驗室及實廠之試驗，可計算求得每年操作成本（NT/year）包括電力及耗材成本的估算約為$31,633元。

中文關鍵字

空降污染物,臭氧/觸媒氧化系統,無塵室

類型	檔名	檔案大小	說明	最新版公開日期
期末報告	觸媒氧化技術應用於高科技產業無塵室空氣品質改善設備之開發.pdf	5MB	[期末報告]公開完整版	2009/9/1 上午 12:00:00

摘要	Since the negative impact of airborne molecular contamination (AMC) on yield rate in manufacturing process and human health has been substantially approved, the improvement of indoor air quality in clean room has attracted much attention in the recent years. This project was focused on the removal of AMC, including hydrofluoric acid, hydrochloric acid, sulfuric acid, nitric acid, tetramethylammonium hydroxide, isopropanol, acetone, propylene glycol monomethyl ether acetate, and dimethyl sulfoxide, as usually seen in most clean rooms in semi-conductor and photonic industries by using ozone and catalytic oxidation technology, which was designed and developed for the improvement of indoor air quality by our research group. Two phases were carried out in this project. The first phase was focused on the fundamental investigation and the second phase was on the design of treatment system and equipment assembly as applied practically in clean room in Feng Chia University. In the first phase, inorganic acids and bases, and organics were optimally removed by adjusting different experimental conditions. CatalystA manufactured by our collaborated company was found to be able to efficiently decompose hydrofluoric acid, hydrochloric acid, sulfuric acid, and nitric acid more than 90 percent under the situation of packing 150 grams of absorbent catalystA and controlling inflow flowrate as 1,223 mL/min. Inorganic base, such as tetramethylammonium hydroxide, was found to be completely removed by packing 100 grams of catalystB and controlling inflow flowrate at 937 mL/min. To better enhance the removal efficiency of organic AMC compounds, heterogeneous ozonation combining ozone (8.12±0.02 ppm) and goethite catalyst (60 g) at gaseous flowrate 730 mL/min was employed in our lab experiment. Under this situation, it is found that more than 98% removal rate could be achieved for all organic compounds. After all optimal parameters were established from our lab work, a full-scale treatment system was thus fabricated to conduct a series of tests at the clean room in Engineering College in our university. When the system was operated at an air exchange rate at 5.5 ach (air change per hour) and air flowrate at 0.18 m3/sec, it is found all inorganic acids, inorganic base, and organic AMC molecules in the indoor air were eliminated more than 90 percent within the period time of three hours, where the residual concentration of gaseous ozone was detected less than 0.01 ppm that meets the standard of OSHA regulations for indoor working place. Based on these results, the indoor air treatment system developed for the AMC purification in clean room could be potentially applied in high-tech industries, thus providing a better environment for enhancing yield rate in manufacturing process. In addition, the operating cost of the catalytic oxidation equipment is approximately estimated to be NT$ 31,633 per year.
英文關鍵字	Airborne Molecular Contamination (AMC), Heterogeneous Ozonation, Clean Room

摘要

Since the negative impact of airborne molecular contamination (AMC) on yield rate in manufacturing process and human health has been substantially approved, the improvement of indoor air quality in clean room has attracted much attention in the recent years. This project was focused on the removal of AMC, including hydrofluoric acid, hydrochloric acid, sulfuric acid, nitric acid, tetramethylammonium hydroxide, isopropanol, acetone, propylene glycol monomethyl ether acetate, and dimethyl sulfoxide, as usually seen in most clean rooms in semi-conductor and photonic industries by using ozone and catalytic oxidation technology, which was designed and developed for the improvement of indoor air quality by our research group. Two phases were carried out in this project. The first phase was focused on the fundamental investigation and the second phase was on the design of treatment system and equipment assembly as applied practically in clean room in Feng Chia University. In the first phase, inorganic acids and bases, and organics were optimally removed by adjusting different experimental conditions. CatalystA manufactured by our collaborated company was found to be able to efficiently decompose hydrofluoric acid, hydrochloric acid, sulfuric acid, and nitric acid more than 90 percent under the situation of packing 150 grams of absorbent catalystA and controlling inflow flowrate as 1,223 mL/min. Inorganic base, such as tetramethylammonium hydroxide, was found to be completely removed by packing 100 grams of catalystB and controlling inflow flowrate at 937 mL/min. To better enhance the removal efficiency of organic AMC compounds, heterogeneous ozonation combining ozone (8.12±0.02 ppm) and goethite catalyst (60 g) at gaseous flowrate 730 mL/min was employed in our lab experiment. Under this situation, it is found that more than 98% removal rate could be achieved for all organic compounds. After all optimal parameters were established from our lab work, a full-scale treatment system was thus fabricated to conduct a series of tests at the clean room in Engineering College in our university. When the system was operated at an air exchange rate at 5.5 ach (air change per hour) and air flowrate at 0.18 m3/sec, it is found all inorganic acids, inorganic base, and organic AMC molecules in the indoor air were eliminated more than 90 percent within the period time of three hours, where the residual concentration of gaseous ozone was detected less than 0.01 ppm that meets the standard of OSHA regulations for indoor working place. Based on these results, the indoor air treatment system developed for the AMC purification in clean room could be potentially applied in high-tech industries, thus providing a better environment for enhancing yield rate in manufacturing process. In addition, the operating cost of the catalytic oxidation equipment is approximately estimated to be NT$ 31,633 per year.

英文關鍵字

Airborne Molecular Contamination (AMC), Heterogeneous Ozonation, Clean Room