環境資源報告成果查詢系統

硫酸等空氣中無機酸調查與技術比對開發

中文摘要 本計畫目的是比對與開發空氣中氟化氫(HF)、氯化氫(HCl)、溴化氫(HBr)、硝酸(HNO3)、磷酸(H3PO4)、硫酸(H2SO4)及甲酸(HCOOH)等七項空氣污染物之調查技術。經技術比對後HF及HCOOH建議採用衝擊瓶吸收法,以去離子水(DIW)為吸收液,並以KOH為流洗液之離子層析儀(IC)進行分析,方法偵測極限(MDL)為0.07 ppbv (空氣中),遠低於現行矽膠吸附管法(6.43 ppbv),甲酸MDL為0.72 ppbv (空氣中)。 HCl、HBr及HNO3建議採用濾紙捕集法,使用碳酸鈉浸潤改質石英濾紙,捕集後之濾紙經萃取後,以9 mM 碳酸鈉為流洗液之IC進行分析。HCl、HBr及HNO3之MDL分別為2.23、0.18及0.25 ppbv (空氣中),皆低於現行的矽膠吸附管法。 H3PO4及H2SO4建議採用濾紙捕集法,在空氣中H3PO4及H2SO4以液態氣膠存在,故採用一張石英濾紙捕集,MDL為H3PO4 (0.35 μg/Nm3)、H2SO4 (0.30 μg/Nm3),遠低於現行的矽膠吸附管法。 本計畫利用上述建立之酸性氣體調查技術分別採集半導體、光電業、石化業、事業廢棄物焚化爐、玻璃熔爐等廠家/製程附近之周界空氣,完成六場次的空氣中硫酸等七種污染物之實廠調查。HF及HCOOH使用衝擊瓶吸收法,以DIW為吸收液,HF之濃度範圍ND(< 0.07)至1.8 ppbv,添加回收率為92.7至103.7%。HCOOH之濃度ND(< 0.72)至13.4 ppbv,添加回收率98.8至106.9%。其他無機酸使用濾紙捕集法,實廠HCl、HBr、HNO3及H3PO4之濃度皆未檢出,添加回收率80.1-92.5%,H2SO4之濃度範圍ND (<0.3)至7.8 g/Nm3,添加回收率97.1%。由以上資料顯示本計畫開發之酸性氣體調查技術經實廠驗證是可行的。採集後之樣品冷藏於4℃能保存14天。此外,本計畫於109年9月及10月分別完成兩場次之調查技術擴散課程,並撰寫完成5篇空氣中酸性氣體調查技術草案,提供給環保署環檢所作為日後檢測技術援引參考。
中文關鍵字 周界空氣、無機酸、採樣、衝擊瓶、濾紙

基本資訊

專案計畫編號 經費年度 109 計畫經費 2250 千元
專案開始日期 2020/01/30 專案結束日期 2020/12/31 專案主持人 王厚傳
主辦單位 環檢所 承辦人 潘銓泰 執行單位 工業技術研究院綠能與環境研究所

成果下載

類型 檔名 檔案大小 說明
期末報告 硫酸等空氣中無機酸調查與技術比對開發.pdf 8MB 期末報告

Comparison and Development of Sampling and Analytical Methods for Inorganic Acids (Sulfuric Acid, Hydrogen Chloride, Hydrogen Fluoride, Hydrogen Bromide, Nitric Acid, Phosphoric Acid, and Formic Acid)

英文摘要 The major objective of this project is to compare and develop sampling and analysis technologies of inorganic acids including hydrogen fluoride (HF), hydrogen chloride (HCl), hydrogen bromide (HBr), nitric acid (HNO3), phosphoric acid (H3PO4), sulfuric acid (H2SO4), and formic acid (HCOOH) in ambient air. We have developed a sampling method for the determination of HF and HCOOH in air by serially connecting impinger and personal sampling pump. Ion chromatography using 12 mM KOH as eluent solution was employed for the analysis of fluoride and formate ion absorbed in the deionized water (DIW). The method detection limit (MDL) of HF was 0.07 ppbv in air, and which is much lower than that of the current measurement of HF by using silica gel tube (6.43 ppbv). For HCOOH, the MDL was 0.72 ppbv in air. Besides, the sampling of HCl, HBr, and HNO3 in air were carried out using a double filter combination with a personal sampling pump. After the Na2CO3 treated quartz filter samples were extracted by using a sonication. Ion chromatography using 9 mM Na2CO3 as eluent solution was employed for the analysis of Cl-, Br- and NO3- ions in the extraction samples. The MDL were 2.2 ppbv for HCl, 0.18 ppbv for HBr, and 0.25 ppbv for HNO3 in air, respectively, and which were lower than that of silica gel tubes. Since H3PO4 and H2SO4 exit as liquid aerosol, which were captured by using an un-treated quartz filter with a personal sampling pump. The MDL were 0.35 μg/Nm3 for H3PO4 and 0.30 μg/Nm3 for H2SO4, respectively, which were much lower than that of the current sampling method of silica gel tubes (H3PO4: 27.4 μg/Nm3、H2SO4: 9.7 μg/Nm3). This project is also to measure the concentrations of these inorganic acids in ambient air near the semiconductor, photoelectronic industry, petrochemical industry, waste incinerator, and glass melting furnace by using the above sampling methods developed. We have carried out 6 sessions of field tests for inorganic acids sampling. HF and HCOOH in ambient air were measured by the impinger method. The concentration of HF was in the range of ND (< 0.07) to 1.8 ppbv and the recovery was 92.7 to 103.7%. The concentrations of HCOOH was ND (< 0.72) to 13.4 ppbv and the recovery was 98.8 to 106.9%. The other inorganic acids (HCl, HBr, HNO3, H3PO4, and H2SO4) were measured by using the filter method. The concentrations of HCl, HBr, HNO3, and H3PO4 were all below the MDL and the recovery were 80.1-92.5%. The concentration of H2SO4 was in the range of ND (< 0.3) to 7.8 g/Nm3 and the recovery was 97.1%. These results indicates that measurement methods of inorganic acids in ambient air developed in this study were feasible. All samples were refrigerated at 4℃ at the lab and need to be analyzed within 14 days of receipt. We have written the 5 drafts of the measurement of inorganic acids in ambient air to the reference for EPA. In addition, two sessions of technology demonstration workshop were held in September and October, 2020.
英文關鍵字 ambient air, inorganic acid, sampling, impinger, filter